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A parametric modeling method of flexure hinge mechanism was proposed. Using this method, the finite element analysis model could be automatically created by the document programmed with the parametric language APDL provided by the finite element software ANSYS. The influence of the displacement performances of flexure hinge mechanism was analyzed, which was affected by machining errors of the minimum hinge thickness, the cutting radius and the width, and the angular errors of the part axes with respect to x, y and z axis. The results demonstrate that the machining error of the minimum hinge thickness is the main factor to all the machining errors.