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磁流變減振器集成式壓阻加速度傳感器設(shè)計(jì)與試驗(yàn)
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國(guó)家自然科學(xué)基金項(xiàng)目(51275539、51675063)和重慶市研究生科技創(chuàng)新項(xiàng)目(CYB15017)


Design and Test of Magneto-rheological Damper Piezo-resistive Acceleration Sensor
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    摘要:

    為滿足汽車半主動(dòng)懸架磁流變減振器運(yùn)行過(guò)程中健康狀態(tài)監(jiān)測(cè)的需求,提高傳感系統(tǒng)的可靠性,設(shè)計(jì)了一種可以測(cè)量動(dòng)態(tài)加速度的磁流變減振器外置集成式壓阻加速度傳感器。根據(jù)減振器的工作特性和壓阻加速度傳感器的特點(diǎn),提出了減振器集成加速度傳感器的概念,確定了集成方式。分析了集成式壓阻傳感器的設(shè)計(jì)原則并對(duì)芯片進(jìn)行了結(jié)構(gòu)選型。為保證傳感器具有較大的靈敏度以及較好的動(dòng)態(tài)特性,以測(cè)試量程為約束條件,采用理論模型推導(dǎo)與有限元仿真結(jié)合的方法,確定了芯片的主要尺寸參數(shù),進(jìn)一步通過(guò)理論分析完成了芯片的版圖設(shè)計(jì)。參照設(shè)計(jì)的加速度傳感器參數(shù),進(jìn)行了訂制,在正弦和隨機(jī)激勵(lì)下對(duì)采用集成加速度傳感器的磁流變減振器的單自由度懸架進(jìn)行了測(cè)試與分析,結(jié)果證明所設(shè)計(jì)的加速度傳感器具有較好的精度及動(dòng)態(tài)穩(wěn)定性,能夠滿足使用要求。

    Abstract:

    To satisfy the health monitoring requirements of the on-state magneto-rheological (MR) semi-active suspension shock absorber and improve the reliability of the damping system, a piezo-resistive acceleration sensor integrated with MR absorber was designed to measure the dynamic acceleration. According to the characteristic of shock absorber and the piezo-resistive acceleration sensor, the concept of integrated acceleration sensor was proposed. Then the design principle of the integrated piezo-resistive sensor was analyzed. Structure selection of the chip was determined on the basis of the principle. In order to ensure the high sensitivity and good dynamic characteristics of the sensor, the main dimension parameters of chip were derived by theoretical analysis and finite element method while the testing range was set as one of the constraints. The layout of the chip, the width and length of the resistor were designed based on the theoretical analysis. Based on the finite element method analysis, the transverse sensitivity was smaller than the vertical sensitivity. Comparing with the vertical acceleration, the effects of transverse acceleration can be ignored. The maximum yield force appeared at the root of beam. Referring to the design requirements, a piezo-resistive acceleration sensor was designed. The single degree of freedom MR suspension with the MR damper integrated acceleration sensor was tested under the sine and random signals. The results showed that the designed acceleration sensor had good precision and dynamic stability which can satisfy the application requirement.

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董小閔,于建強(qiáng),毛飛,陳平根.磁流變減振器集成式壓阻加速度傳感器設(shè)計(jì)與試驗(yàn)[J].農(nóng)業(yè)機(jī)械學(xué)報(bào),2017,48(8):391-398. DONG Xiaomin, YU Jianqiang, MAO Fei, CHEN Pinggen. Design and Test of Magneto-rheological Damper Piezo-resistive Acceleration Sensor[J]. Transactions of the Chinese Society for Agricultural Machinery,2017,48(8):391-398.

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  • 收稿日期:2016-11-24
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  • 在線發(fā)布日期: 2017-08-10
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