Abstract:Based on the urgent demand of modern agricultural development for micro near infrared (NIR) spectrometer, the experimental research on the core component of the NIR spectrometer was carried out. To overcome the problems of high driving voltage, small scanning angle, etc., the structural optimization and improvement of driving system for the electromagnetic MOEMS scanning grating mirror was proposed. By using the professional simulation software Maxwell 16.0 to optimize the magnetic field of the permanent magnets with different sizes and material properties, the NdFeB with different grades of N38 and N52 was obtained as the working permanent magnets. On this basis, two electromagnetic MOEMS scanning grating mirrors marked A1 and A2 with the same size were designed and fabricated, which were used to combine with the two permanent magnets respectively for performance test. The test results showed that compared with the permanent magnet N38 with weak magnetism, when the two electromagnetic MOEMS scanning grating mirrors combined with N52 reached the maximum mechanical scanning half angle, the driving voltage was decreased by 6.6% and 8.6%, and the maximum mechanical scanning half angle was increased by 20.2% and 17.4%, respectively. Through the comparison and analysis of the mechanical and electrical performance test results, it can be concluded that the structural improvement of the driving system can effectively improve the performance of the MOEMS scanning grating mirror, and it had important practical application value for improving the spectral detection range and accuracy of the NIR spectrometer.