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基于平衡附加力原理的微動(dòng)放大機(jī)構(gòu)設(shè)計(jì)與實(shí)驗(yàn)
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國家自然科學(xué)基金項(xiàng)目(51805428)、陜西省創(chuàng)新能力支撐計(jì)劃項(xiàng)目(2021TD-27)和陜西省教育廳青年創(chuàng)新團(tuán)隊(duì)建設(shè)科研計(jì)劃項(xiàng)目(22JP045)


Design and Experiment of Precision Micro-drive Amplifying Mechanism Based on Principle of Balanced Additional Force
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    摘要:

    微動(dòng)機(jī)構(gòu)是實(shí)現(xiàn)超精密定位的重要部件。本文基于平衡附加力原理設(shè)計(jì)一種放大比可調(diào)的精密微動(dòng)放大機(jī)構(gòu),并完成機(jī)構(gòu)強(qiáng)度、動(dòng)態(tài)、運(yùn)動(dòng)學(xué)分析?;谄胶飧郊恿υ碓O(shè)計(jì)了一種無附加力及位移的微動(dòng)放大機(jī)構(gòu),可確保運(yùn)動(dòng)過程的安全性及精密性。采用有限元法完成了機(jī)構(gòu)強(qiáng)度分析,結(jié)果表明系統(tǒng)強(qiáng)度滿足設(shè)計(jì)要求。采用有限元法及實(shí)驗(yàn)分析完成了機(jī)構(gòu)的動(dòng)態(tài)性能分析,二者最大相對(duì)誤差為9.41%,結(jié)果表明機(jī)構(gòu)動(dòng)態(tài)性能符合設(shè)計(jì)要求且運(yùn)動(dòng)過程中不會(huì)發(fā)生共振。采用理論計(jì)算、有限元分析及實(shí)驗(yàn)分析完成了機(jī)構(gòu)運(yùn)動(dòng)學(xué)分析,在完成3種方法線性擬合基礎(chǔ)上解析了機(jī)構(gòu)運(yùn)動(dòng)方程,微動(dòng)放大機(jī)構(gòu)理論與實(shí)驗(yàn)分析相對(duì)誤差為9.4%(二者最大絕對(duì)誤差為0.85μm),有限元與實(shí)驗(yàn)分析相對(duì)誤差為7.8%(二者最大絕對(duì)誤差為0.57μm),運(yùn)動(dòng)線性擬合相關(guān)系數(shù)不小于0.998。結(jié)果表明微動(dòng)放大機(jī)構(gòu)具有強(qiáng)度及動(dòng)態(tài)性能優(yōu)良、運(yùn)動(dòng)精密、線性度高等優(yōu)點(diǎn)。

    Abstract:

    The micro-drive mechanism is an important component to achieve ultra-precision positioning. Based on the principle of balancing additional force, a precision micro-drive amplifying mechanism with adjustable amplification ratio was designed, and the strength, dynamic and kinematics analysis of the mechanism were completed. Based on the principle of balancing additional force, a micro-drive amplifying mechanism without additional force and displacement was designed to ensure the safety and precision of the movement process. The strength analysis of the mechanism was completed by the finite element method, and the results showed that the strength of the system met the design requirements. The finite element method and experimental analysis were used to complete the dynamic performance analysis of the mechanism, and the maximum relative error was 9.41%. The results showed that the dynamic performance of the mechanism met the design requirements and resonance did not occur during the motion process. The kinematics analysis of the mechanism was completed by theoretical calculation, finite element analysis and experimental analysis. The kinematic equation of the mechanism was resolved based on the linear fitting of the three methods. The relative error between the theoretical calculation and experimental analysis of the micro-drive amplifying mechanism was 9.4% (the maximum error was 0.85μm), and the relative error between the finite element and experimental analysis was 7.8% (the maximum error was 0.57μm). The correlation coefficient of motion linear fitting was not less than 0.998. The results showed that the micro-drive amplifying mechanism had the advantages of excellent strength and dynamic performance, precise movement, and high linearity.

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楊滿芝,李林岳,張傳偉,魏凱洋,黨蒙,景鋼.基于平衡附加力原理的微動(dòng)放大機(jī)構(gòu)設(shè)計(jì)與實(shí)驗(yàn)[J].農(nóng)業(yè)機(jī)械學(xué)報(bào),2022,53(12):452-458. YANG Manzhi, LI Linyue, ZHANG Chuanwei, WEI Kaiyang, DANG Meng, JING Gang. Design and Experiment of Precision Micro-drive Amplifying Mechanism Based on Principle of Balanced Additional Force[J]. Transactions of the Chinese Society for Agricultural Machinery,2022,53(12):452-458.

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  • 收稿日期:2022-08-27
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  • 在線發(fā)布日期: 2022-09-23
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